Application Case of Tubular PEALD Coating Equipment for Photovoltaic Industry

2024-09-14

Application Industry: Tubular PEALD coating equipment for photovoltaic solar panel production


Product Model Used: AI-8x9 Series


Process Overview:The POLY PECVD (Plasma-Enhanced Chemical Vapor Deposition) process in the TOPCon route of photovoltaic technology is a critical step for depositing polysilicon layers. Its primary objectives include improving solar cell conversion efficiency, optimizing passivated contact structures, enhancing process efficiency and cost control, and ensuring the stability and reliability of solar cells while adapting to future technological trends.

Problems Addressed for Leading Photovoltaic Customers:
Each machine has 6 tubes, with 9 temperature control points per tube. Temperature control requirements vary based on process needs, production capacity, and yield. For example, to increase capacity, customers reduced preheating time and accelerated heating rates. By optimizing parameters, the system achieved the required precision.


Value Delivered to Customers:YUDIAN temperature control modules improved equipment temperature accuracy, shortened debugging cycles, boosted production efficiency, and reduced costs. The modules provided reliable technical support, enabling faster delivery and cost savings. Compared to British competitors, YuDian software for process programming and debugging was more user-friendly. After on-site validation with the customer’s technical team, Y ELECTRONICS' modules fully met process requirements, earning praise from equipment manufacturers.


On-Site Application Details:The YUDIAN AI-8x9 Series cascade intelligent temperature control modules use inner and outer thermocouples with a single setpoint. For each tube, the 9 temperature control points are maintained between 440°C and 448°C. Leveraging YUDIAN advanced AI algorithms and comprehensive technical support, temperature control precision was significantly improved, enhancing product yield. Additionally, the built-in self-tuning function streamlined equipment debugging. A simple self-tuning operation during the initial setup phase enabled the system to meet process precision requirements. If further adjustments were needed, manual tweaking of PID and CC parameters quickly achieved precise temperature control.


Customer Feedback:
Technical Department:
Competitors from the UK were criticized for high prices, limited technical support, and complex operations. YUDIAN, as a leading domestic measurement and control instrument manufacturer, addressed these challenges through innovation and R&D. Their cascade control technology filled a domestic market gap. YuDian collaborated closely with the customer’s R&D team to meet diverse control needs, such as dual PID switching, programmed temperature ramping, amplitude limitation, and linear heating rate settings. These features prevented excessive initial heating power, extending heater lifespans and fully satisfying customer requirements.


Technical Support:

YUDIAN provides 24/7 technical support. Its experienced team worked with the customer’s R&D team to troubleshoot temperature deviations, identifying factors like sensor placement and power controller linearity. By prioritizing customer needs, YuDian ensured stable equipment operation. The customer plans to prioritize YuDian solutions in future R&D projects for long-term collaboration.


Purchasing Department Feedback:

YUDIAN modules offer high cost-effectiveness, stable delivery schedules, and reliable after-sales service.


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